The Advanced Photon Source
a U.S. Department of Energy Office of Science User Facility

Ptychographic Imaging for Future Candidate of Semiconductor Metrology and Inspection

Type Of Event
Presentation
Sponsoring Division
XSD
Location
Virtual
Speaker
Dr. Jangwoon Sung, Samsung Electronics Co., Ltd.
Host
Volker Rose
Start Date
01-26-2023
Start Time
2:00 p.m.
Description

Abstract:

Recent development of nanofabrication technology makes semiconductor devices have smaller form factor for high performance, continuing to require novel metrology methods with high sensitivity. Among lots of solutions to it, I and other three colleagues are designated to verify computational imaging methods for future candidate. Since the final goal is using EUV source and I was the only one having major near to it, I had to construct and understand the ptychographic reconstruction algorithm and related algorithms. This presentation includes what I have done in Samsung Electronics as far as it does not reveal confidential information.

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01.19.2023

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