Advanced Sensors for Synchrotron Applications from Zygo Corporation

Type Of Event
Presentation
Sponsoring Division
XSD
Location
401/A1100
Building Number
401
Room Number
A1100
Speaker
Ernesto Abruña, AMETEK Ultra Precision Technologies
Start Date
03-02-2017
Start Time
1:30 p.m.
Description

To enable the next generation of synchrotron beamline performance, high precision UHV position sensors are needed to close the loop for actively adjusted optics. Fiber based interferometer sensors on the market today do not meet the needs of these synchrotron applications. ZYGO has recently released a new sensor system called ZPS™, which delivers absolute position, rather than relative displacement, with sub-nanometer precision using compact (Ø3 × 27mm) fiber based vacuum compatible sensors. Compared to competing technologies, ZPS provides a lower noise floor (< 0.2 nm RMS at 1kHz bandwidth), over a longer range (1.2 mm), and better measurement stability over time (≤ 1nm/day). ZYGO is a metrology company with a deep understanding of precision engineering and a long history of addressing the most complex metrology challenges. The ZPS sensor system delivers the level of absolute position feedback required for next generation beamline optics, enabling new science and lowering operating costs.

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