Abstract:
Floating stage technology allows for high accuracies in dynamic, fast moving applications. Well-known mechatronic principles from the semiconductor industry are applied to this synchrotron application and will be explained, like error budgeting, balance masses and Lorentz-actuators.

Presenters:

Ronald Schneider and Theo Ruijl are from MI Partners. MI-Partners is based in the Netherlands and active in research and development of high-end mechatronic products and systems. We are specialized in concept generation and validation for ultra-fast (>10g), extremely accurate (sub-nanometer) or complex positioning systems like stages, manipulators, robots and handlers. Special state-of-the-art equipment, based on unique user requirements, can be delivered to our customers. Our core competences are System architecture, Predictive modelling, Dynamics, Thermal control (Cryo) and Precision Engineering.