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Hi All,
Does anyone have EPICS serial device support the Kashiyama Mu100 or Mu300 vacuum pump?
http://www.kashiyama.com/us/archives/product-mu/overview.html
Thanks,
Matt
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Matt Boyes
SLAC National Accelerator Laboratory
2575 Sand Hill Rd MS 50
Menlo Park, CA 94025
[email protected]
Phone: (650)926-5204