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CNM Workshop 8—Nanostructured Carbon Materials for MEMS/NEMS and Nanoelectronics

Wednesday, May 8, 2013 (all day)
Bldg. 401, Rm. A5000

Organizers: Anirudha V. Sumant (CNM) and Horacio Espinosa (Northwestern University)

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The purpose of this workshop is to bring together experts from academia, national labs, and industry to discuss the latest developments in the synthesis and characterization of nanostructured carbon materials, which are specifically geared toward the development of advanced micro/nanosystems and nanoelectronic devices.

The materials of interest include nano/ultrananocrystalline diamond, carbon nanotubes, and graphene. The Center for Nanoscale Materials at Argonne has expertise and state-of-the-art facilities in the synthesis, characterization, and fabrication of all of the above-mentioned carbon materials, as well as a strong research program in fundamental studies on various aspects of these materials. The exceptional physical, chemical, bio-medical, mechanical, electrical, thermal and optical properties offered by these materials are promising for the development of high-performance MEMS/NEMS and nanoelectronic devices in various technologically important areas. This workshop will include topics covering fundamental studies on synthesis, characterization, and new properties; theoretical and modeling studies to understand structure property relationship; and issues related to fabrication and integration at micro/nanoscale.

This workshop is expected to provide an excellent platform for academics, scientists, and students to exchange ideas, foster collaborations with user facilities at Argonne, and embark upon new challenges in nanoscience.

Workshop Topics

  • Advances in growth, processing, and characterization(nano/ultra-nanocrystalline diamond, carbon nanotubes, and graphene)
  • Device fabrication and processing:  advances and issues
  • Surfaces and interfaces in MEMS and NEMS: surface chemistry and tribology
  • Advances in lithography and patterning
  • Carbon nanoelectronic devices
  • Nanomechanical testing and properties


The workshop report (PDF) summarizes each talk and the overall issues raised.


8:45 Anirudha Sumant (Argonne National Laboratory), Horacio Espinosa (Northwestern University)
Welcome and Introductory Remarks
9:00 James Hone (Columbia University)
Graphene Mechanics and NEMS Applications (abstract)
9:40 Nikhil Koratkar (Rensselaer Polytechnic Institute)
Wetting Transparency of Graphene (abstract)
10:20 Break
10:50 James Hannon (IBM)
Carbon Nanotubes from Lab to Fab (abstract)
11:30 Adam Khan (AKHAN Technologies, Inc.)
Towards Achieving Efficient N-type Doping in Nanocrystalline Diamond (abstract)
12:15 Lunch
1:50 Merlijn van Spengen (Delft University of Technology, Netherlands)
MEMS On-chip Tribometers and the Relevance of N-UNCD (abstract)
2:30 Federico Buja (Delft University of Technology, Netherlands)
Fabrication and Actuation of Nitrogen-incorporated Ultrananocrystalline Diamond Thermal Actuator (abstract)
3:10 Break
3:40 Philip Feng (Case Western Reserve University)
Silicon Carbide Nanoelectromechanical Systems (SiC NEMS) for Logic Devices in Extreme Environments (abstract)
4:20 Izabela Szlufarska (University of Wisconsin-Madison)
Wear of Nanocrystalline Carbide Ceramics by Atomistic Simulations (abstract)
5:00 Adjourn

Updated 02/28/14