Optics Fabrication and Metrology at the APS
Experimental Facilities Division
The OFM group has as its mission the fabrication and measurement of
x-ray optics for APS beamlines. Examples from four areas will be presented:
i) fabrication, polishing, and etching of crystal monochromators and analyzers;
ii) x-ray topography and x-ray characterization of monochromators and thin
film substrates ; iii) thin film deposition for grazing incidence mirrors
and multilayer optics; iv) metrology of x-ray optics done without using
x-rays. Some specialized optics will be discussed including : diamond monochromators,
Kirkpatrick-Baez focusing mirrors, multilayer monochromators, and multiple
lens designs that are based on x-ray refraction.
Supported by the U.S. DOE, Office of Science, BES, under contract No.