Table 1: Source Point Data Generated Tue Nov 24 16:59:52 CST 2009 for I=101.98 mA, along with nominal (0) values.

Name	exEff	CplngEff	Sx	Sxp	Sy	Syp	exEff0	CplngEff0	Sx0	Sxp0	Sy0	Syp0
	nm	%	um	urad	um	urad	nm	%	um	urad	um	urad
S1ID	2.87	1.5	260.6	11.0	13.6	3.2	3.32	1.1	275.8	12.1	12.9	2.9
S2ID	2.88	1.4	260.6	11.1	11.9	3.5	3.34	1.0	275.6	12.1	11.1	3.2
S3ID	2.86	1.2	263.3	10.9	10.7	3.3	3.32	0.9	278.7	11.9	9.8	3.0
S4ID	2.82	1.3	265.7	10.6	10.9	3.3	3.27	0.9	281.7	11.6	10.0	3.0
S5ID	2.81	1.2	264.5	10.7	10.2	3.3	3.26	0.8	280.4	11.7	9.2	3.0
S6ID	2.82	1.4	259.9	10.9	11.3	3.5	3.27	1.0	275.5	11.9	10.4	3.2
S7ID	2.83	1.5	259.7	10.9	12.8	3.4	3.28	1.1	275.2	11.9	12.0	3.1
S8ID	2.82	1.2	262.0	10.8	10.7	3.3	3.27	0.9	277.8	11.8	9.8	3.0
S9ID	2.82	1.2	265.3	10.6	10.3	3.3	3.27	0.9	281.3	11.6	9.4	3.0
S10ID	2.83	1.5	264.2	10.7	12.3	3.4	3.28	1.1	279.9	11.7	11.5	3.1
S11ID	2.85	1.3	261.8	10.9	10.3	3.6	3.30	0.9	277.2	11.9	9.3	3.4
S12ID	2.86	1.3	262.0	10.9	10.6	3.7	3.31	1.0	277.3	11.9	9.6	3.4
S13ID	2.83	1.3	263.3	10.8	10.7	3.5	3.28	1.0	279.0	11.8	9.8	3.2
S14ID	2.81	1.3	264.2	10.6	10.8	3.5	3.26	1.0	280.2	11.6	9.8	3.3
S15ID	2.81	1.5	262.2	10.7	12.5	3.5	3.26	1.1	278.1	11.7	11.6	3.2
S16ID	2.82	1.7	259.4	10.9	14.9	3.3	3.28	1.3	275.0	11.9	14.3	3.0
S17ID	2.83	1.7	259.7	10.9	14.5	3.3	3.28	1.2	275.1	11.9	13.8	3.0
S18ID	2.83	1.9	262.2	10.8	16.4	3.2	3.28	1.4	277.8	11.8	15.8	2.9
S19ID	2.82	1.8	265.8	10.6	15.8	3.3	3.27	1.4	281.7	11.6	15.2	3.0
S20ID	2.83	1.3	265.6	10.6	11.2	3.3	3.28	1.0	281.4	11.6	10.4	3.0
S21ID	2.84	1.2	264.2	10.8	10.0	3.3	3.29	0.8	279.8	11.8	9.0	3.0
S22ID	2.83	1.2	261.7	10.8	10.2	3.3	3.28	0.8	277.3	11.8	9.2	3.0
S23ID	2.81	1.4	259.6	10.8	11.9	3.3	3.26	1.0	275.3	11.8	11.1	3.0
S24ID	2.79	1.3	259.8	10.7	11.4	3.3	3.24	1.0	275.7	11.8	10.5	3.0
S25ID	2.80	1.2	260.1	10.8	10.2	3.3	3.25	0.8	275.9	11.8	9.2	3.0
S26ID	2.82	1.2	261.1	10.8	9.9	3.4	3.28	0.8	276.7	11.8	9.0	3.1
S27ID	2.84	1.2	263.2	10.8	10.5	3.3	3.29	0.9	278.8	11.8	9.6	3.0
S28ID	2.85	1.2	266.1	10.7	10.5	3.4	3.30	0.9	281.8	11.7	9.6	3.1
S29ID	2.86	1.5	268.2	10.7	12.4	3.4	3.31	1.1	283.8	11.7	11.7	3.1
S30ID	2.85	1.4	266.5	10.7	11.9	3.5	3.31	1.1	282.1	11.7	11.1	3.3
S31ID	2.85	2.0	263.7	10.8	15.5	4.3	3.30	1.5	279.2	11.8	14.9	4.1
S32ID	2.81	1.7	112.4	25.0	17.4	2.9	3.26	1.3	119.2	27.3	16.4	2.7
S33ID	2.82	1.6	261.9	10.7	11.9	3.8	3.27	1.2	277.7	11.8	11.1	3.5
S34ID	2.80	1.4	261.8	10.7	11.2	3.5	3.25	1.0	277.7	11.7	10.3	3.2
S35ID	2.80	1.3	260.5	10.8	10.5	3.5	3.25	0.9	276.4	11.8	9.5	3.2

Table 2: Source Point Data Generated Tue Nov 24 16:59:52 CST 2009 for I=101.98 mA

Name	betax	alphax	etax	etaxp	betay	alphay	etay	etayp
	m		m		m		m
S1ID	18.5	-0.071	0.171	0.000	3.1	0.034	-0.010	0.000
S2ID	18.3	-0.033	0.172	0.001	3.1	0.058	-0.007	-0.001
S3ID	18.9	-0.005	0.172	0.001	3.0	0.065	0.004	0.000
S4ID	19.8	-0.015	0.170	0.001	3.1	0.041	-0.004	0.000
S5ID	19.7	-0.040	0.168	0.000	3.1	0.053	-0.001	-0.001
S6ID	18.9	-0.025	0.166	0.000	3.1	0.046	0.005	0.001
S7ID	18.9	0.010	0.167	-0.000	3.1	0.036	-0.008	-0.001
S8ID	19.3	0.037	0.167	-0.000	3.2	0.039	0.003	0.000
S9ID	19.9	0.013	0.169	-0.000	3.2	0.035	-0.001	-0.001
S10ID	19.5	-0.026	0.170	-0.000	3.2	0.021	0.007	0.001
S11ID	18.8	-0.021	0.170	-0.000	3.2	0.019	-0.001	-0.002
S12ID	18.8	0.012	0.171	-0.000	3.2	0.013	0.003	0.002
S13ID	19.3	0.044	0.169	0.000	3.3	-0.016	-0.003	-0.002
S14ID	19.8	0.011	0.167	-0.000	3.3	-0.045	0.003	0.002
S15ID	19.5	-0.029	0.166	0.000	3.3	-0.060	0.007	-0.002
S16ID	18.9	-0.029	0.166	0.000	3.3	-0.065	-0.011	0.001
S17ID	18.8	0.010	0.167	-0.000	3.3	-0.083	0.011	-0.001
S18ID	19.1	0.031	0.169	-0.000	3.2	-0.089	-0.013	0.000
S19ID	19.8	0.016	0.170	-0.000	3.1	-0.090	0.013	-0.000
S20ID	19.7	-0.008	0.170	-0.000	3.1	-0.094	-0.005	0.001
S21ID	19.3	-0.005	0.171	0.000	3.0	-0.085	0.001	-0.000
S22ID	19.1	-0.013	0.168	0.000	3.1	-0.103	-0.001	0.000
S23ID	19.1	0.013	0.164	0.000	3.1	-0.044	0.007	0.000
S24ID	19.4	0.005	0.163	0.000	3.0	-0.010	-0.006	-0.000
S25ID	19.2	-0.032	0.164	-0.000	3.0	0.066	0.002	0.000
S26ID	19.1	-0.027	0.167	0.000	3.0	0.074	-0.001	-0.001
S27ID	19.2	-0.022	0.170	0.000	3.0	0.079	0.004	-0.000
S28ID	19.5	-0.001	0.173	-0.000	3.0	0.015	-0.003	-0.001
S29ID	19.7	0.020	0.175	-0.000	3.0	-0.030	0.008	0.001
S30ID	19.5	0.024	0.173	-0.000	3.1	-0.014	-0.007	-0.001
S31ID	19.1	-0.002	0.172	0.000	3.1	0.014	0.012	0.003
S32ID	3.6	0.007	0.071	0.000	5.5	0.030	-0.012	-0.002
S33ID	19.4	0.014	0.167	0.000	3.2	0.075	0.007	0.002
S34ID	19.5	-0.011	0.165	0.000	3.2	0.055	-0.005	-0.001
S35ID	19.3	-0.002	0.164	0.000	3.2	0.095	0.002	0.001

Table 3: Source Point Data Generated Tue Nov 24 16:59:52 CST 2009 for I=101.98 mA, along with nominal (0) values.

Name	exEff	CplngEff	Sx	Sxp	Sy	Syp	exEff0	CplngEff0	Sx0	Sxp0	Sy0	Syp0
	nm	%	um	urad	um	urad	nm	%	um	urad	um	urad
S1BM	2.84	1.5	80.5	50.5	28.3	1.6	3.29	1.1	85.4	54.2	25.6	1.5
S2BM	2.83	1.2	78.9	50.0	28.8	1.4	3.28	0.9	83.6	53.6	26.0	1.3
S3BM	2.84	1.4	78.0	50.6	29.2	1.4	3.29	1.0	82.6	54.3	26.4	1.3
S4BM	2.84	1.3	78.4	51.7	29.2	1.3	3.29	0.9	83.1	55.5	26.5	1.2
S5BM	2.84	1.2	80.0	51.8	28.8	1.3	3.29	0.9	84.8	55.6	26.1	1.2
S6BM	2.86	1.2	80.4	51.2	29.2	1.3	3.31	0.8	85.2	54.9	26.5	1.2
S7BM	2.90	1.5	80.2	51.1	28.5	1.6	3.35	1.1	84.8	54.8	25.8	1.5
S8BM	2.92	1.3	79.5	51.6	28.4	1.5	3.37	1.0	84.0	55.3	25.8	1.4
S9BM	2.91	1.3	79.6	52.0	28.7	1.5	3.36	0.9	84.1	55.8	26.1	1.4
S10BM	2.87	1.4	80.3	51.6	28.4	1.6	3.32	1.0	85.0	55.3	25.8	1.5
S11BM	2.86	1.3	80.3	50.9	31.7	1.4	3.32	1.0	85.1	54.6	29.3	1.3
S12BM	2.88	1.3	79.3	50.7	30.9	1.4	3.33	0.9	83.9	54.4	28.5	1.3
S13BM	2.88	1.3	78.1	51.4	30.4	1.5	3.33	1.0	82.6	55.1	28.0	1.4
S14BM	2.88	1.3	79.2	52.1	30.5	1.5	3.33	0.9	83.8	55.9	28.1	1.4
S15BM	2.87	1.5	80.3	52.0	35.0	1.4	3.33	1.1	85.0	55.7	33.0	1.2
S16BM	2.87	1.6	80.8	51.3	32.4	1.5	3.33	1.2	85.5	54.9	30.2	1.4
S17BM	2.90	1.6	80.4	51.0	30.7	1.5	3.36	1.2	85.0	54.7	28.4	1.4
S18BM	2.92	1.7	79.8	51.3	30.0	1.6	3.37	1.3	84.3	55.0	27.6	1.5
S19BM	2.90	2.0	79.2	51.7	29.5	1.9	3.35	1.5	83.7	55.5	27.0	1.8
S20BM	2.87	1.4	79.8	51.7	28.1	1.6	3.32	1.1	84.5	55.5	25.4	1.4
S21BM	2.87	1.2	79.5	51.2	28.0	1.4	3.32	0.8	84.1	55.0	25.3	1.3
S22BM	2.87	1.2	79.8	51.3	27.6	1.4	3.32	0.8	84.5	54.9	24.9	1.2
S23BM	2.89	1.3	79.3	51.6	28.3	1.4	3.34	0.9	83.9	55.3	25.6	1.3
S24BM	2.91	1.3	79.9	52.2	28.3	1.5	3.36	0.9	84.4	55.9	25.6	1.4
S25BM	2.90	1.2	80.8	51.9	28.8	1.4	3.36	0.9	85.4	55.6	26.0	1.3
S26BM	2.89	1.2	80.4	51.4	28.9	1.3	3.34	0.8	85.1	55.1	26.2	1.2
S27BM	2.88	1.3	80.4	51.1	29.0	1.3	3.34	0.9	85.1	54.8	26.3	1.2
S28BM	2.88	1.2	80.2	51.1	28.6	1.3	3.33	0.8	84.8	54.8	25.9	1.2
S29BM	2.88	1.4	79.3	51.0	28.5	1.5	3.33	1.0	83.9	54.8	25.8	1.4
S30BM	2.86	1.4	78.7	51.2	28.6	1.6	3.31	1.0	83.4	55.0	25.9	1.5
S31BM	2.85	1.7	79.1	51.0	30.4	1.9	3.30	1.2	83.8	54.7	27.9	1.8
S32BM	3.61	1.4	83.1	49.8	26.8	3.2	4.09	1.1	88.9	51.7	24.5	3.1
S33BM	4.08	0.9	95.8	49.3	29.6	1.6	4.60	0.7	99.1	52.2	27.1	1.5
S34BM	2.89	1.4	79.9	52.0	29.1	1.6	3.34	1.1	84.5	55.8	26.6	1.5
S35BM	2.95	1.3	93.7	56.4	30.4	1.4	3.41	0.9	99.0	59.8	27.8	1.3

Table 4: Source Point Data Generated Tue Nov 24 16:59:52 CST 2009 for I=101.98 mA

Name	betax	alphax	etax	etaxp	betay	alphay	etay	etayp
	m		m		m		m
S1BM	1.8	0.765	0.052	-0.026	24.3	0.553	-0.002	-0.001
S2BM	1.8	0.706	0.050	-0.026	25.1	0.551	-0.002	0.000
S3BM	1.7	0.704	0.050	-0.026	25.3	0.513	0.005	0.001
S4BM	1.7	0.753	0.050	-0.026	24.5	0.478	-0.007	-0.000
S5BM	1.8	0.791	0.052	-0.027	24.7	0.466	0.005	-0.000
S6BM	1.8	0.751	0.052	-0.027	24.6	0.467	-0.007	0.000
S7BM	1.7	0.711	0.053	-0.027	24.4	0.476	0.004	-0.001
S8BM	1.7	0.710	0.053	-0.027	24.0	0.451	-0.005	0.001
S9BM	1.7	0.745	0.053	-0.026	23.9	0.484	0.007	-0.001
S10BM	1.8	0.779	0.052	-0.026	23.6	0.489	-0.006	0.001
S11BM	1.8	0.751	0.052	-0.026	23.3	0.458	0.016	-0.001
S12BM	1.7	0.708	0.052	-0.026	23.1	0.466	-0.015	0.001
S13BM	1.7	0.704	0.051	-0.026	22.9	0.497	0.014	-0.001
S14BM	1.7	0.759	0.052	-0.027	22.6	0.541	-0.014	0.001
S15BM	1.8	0.777	0.053	-0.027	22.3	0.526	0.023	-0.000
S16BM	1.8	0.751	0.053	-0.027	22.5	0.523	-0.018	-0.001
S17BM	1.7	0.714	0.053	-0.027	22.4	0.533	0.015	0.001
S18BM	1.7	0.710	0.053	-0.026	22.5	0.539	-0.013	-0.001
S19BM	1.7	0.734	0.053	-0.026	23.0	0.559	0.011	0.001
S20BM	1.7	0.773	0.052	-0.026	23.2	0.564	-0.005	-0.001
S21BM	1.7	0.743	0.052	-0.026	23.9	0.596	-0.000	0.000
S22BM	1.7	0.736	0.052	-0.027	23.1	0.573	-0.002	-0.000
S23BM	1.7	0.719	0.052	-0.027	24.0	0.572	0.004	0.000
S24BM	1.7	0.736	0.053	-0.028	24.4	0.560	0.000	-0.001
S25BM	1.7	0.755	0.054	-0.027	25.2	0.512	-0.001	0.001
S26BM	1.7	0.743	0.053	-0.027	25.2	0.461	0.004	-0.000
S27BM	1.8	0.740	0.053	-0.026	25.5	0.453	0.003	0.001
S28BM	1.7	0.744	0.053	-0.026	24.8	0.484	0.002	-0.000
S29BM	1.7	0.735	0.052	-0.025	24.3	0.533	-0.004	0.001
S30BM	1.7	0.745	0.051	-0.025	24.1	0.528	0.006	-0.001
S31BM	1.7	0.741	0.051	-0.026	24.0	0.509	-0.012	0.001
S32BM	2.2	0.166	0.045	-0.040	19.1	1.488	0.010	-0.002
S33BM	1.5	0.028	0.080	-0.031	23.1	0.597	-0.011	0.001
S34BM	1.7	0.755	0.053	-0.027	23.7	0.430	0.009	-0.001
S35BM	2.3	1.049	0.063	-0.036	24.8	0.449	-0.011	0.001