Table 1: Source Point Data Generated Thu Apr 25 16:08:54 CDT 2013 for I=51.78 mA, along with nominal (0) values.
Name exEff CplngEff Sx Sxp Sy Syp exEff0 CplngEff0 Sx0 Sxp0 Sy0 Syp0
  nm % um urad um urad nm % um urad um urad
S1ID 3.06 0.1 270.2 11.3 1.2 2.0 3.18 1.0 274.6 11.6 8.7 3.6
S2ID 3.05 0.1 270.7 11.3 1.0 2.5 3.18 1.1 275.1 11.6 8.6 3.9
S3ID 3.04 0.1 271.6 11.2 1.3 2.1 3.17 1.0 276.1 11.5 8.8 3.6
S4ID 3.04 0.1 271.2 11.2 1.3 2.2 3.16 1.0 275.7 11.5 8.8 3.6
S5ID 3.02 0.1 268.9 11.2 2.1 2.2 3.15 1.0 273.4 11.5 9.0 3.6
S6ID 3.01 0.1 267.8 11.3 2.5 2.0 3.14 1.0 272.3 11.5 9.2 3.5
S7ID 3.01 0.1 265.4 11.3 3.2 2.3 3.14 1.1 269.9 11.6 9.4 3.7
S8ID 3.00 0.1 265.3 11.3 1.7 2.1 3.13 1.0 269.7 11.6 9.1 3.5
S9ID 2.98 0.1 267.9 11.1 3.1 2.1 3.11 1.1 272.5 11.4 9.5 3.5
S10ID 2.99 0.1 269.8 11.1 3.8 2.1 3.12 1.1 274.3 11.4 9.7 3.5
S11ID 3.02 0.0 269.3 11.2 0.9 1.8 3.14 1.0 273.8 11.5 9.0 3.3
S12ID 3.03 0.0 267.2 11.4 1.7 1.8 3.16 1.0 271.6 11.6 9.1 3.4
S13ID 3.04 0.1 268.2 11.3 2.3 2.1 3.17 1.0 272.6 11.6 9.3 3.5
S14ID 3.03 0.1 269.3 11.3 3.3 2.1 3.16 1.0 273.7 11.6 9.6 3.5
S15ID 3.01 0.1 271.0 11.1 3.9 2.2 3.14 1.1 275.5 11.4 9.8 3.6
S16ID 3.02 0.1 269.8 11.2 1.6 2.0 3.15 1.0 274.2 11.5 9.1 3.5
S17ID 3.03 0.1 268.1 11.3 4.1 2.4 3.16 1.1 272.5 11.6 9.8 3.7
S18ID 3.02 0.1 267.1 11.3 2.6 2.1 3.14 1.0 271.5 11.6 9.2 3.6
S19ID 3.01 0.1 267.6 11.3 3.5 1.7 3.14 1.0 272.1 11.5 9.5 3.3
S20ID 3.01 0.1 269.2 11.2 2.0 1.9 3.14 1.0 273.7 11.5 9.0 3.5
S21ID 3.01 0.1 269.4 11.2 1.1 2.2 3.14 1.0 273.9 11.5 8.9 3.7
S22ID 3.03 0.1 268.3 11.3 0.8 2.1 3.16 1.0 272.7 11.6 8.8 3.6
S23ID 3.04 0.0 267.4 11.4 3.3 1.5 3.17 0.9 271.8 11.7 9.4 3.3
S24ID 3.03 0.1 269.1 11.3 3.4 1.6 3.16 1.0 273.5 11.6 9.4 3.3
S25ID 3.01 0.1 268.7 11.2 0.9 2.1 3.14 1.0 273.2 11.5 8.7 3.6
S26ID 3.00 0.1 268.3 11.2 1.2 2.3 3.13 1.1 272.8 11.5 8.8 3.7
S27ID 3.01 0.1 267.2 11.3 2.4 1.9 3.14 1.0 271.7 11.6 9.1 3.5
S28ID 3.03 0.1 268.0 11.3 1.0 2.1 3.15 1.0 272.5 11.6 8.9 3.6
S29ID 3.03 0.1 268.6 11.3 0.9 2.2 3.16 1.0 273.1 11.6 8.9 3.6
S30ID 3.03 0.1 269.8 11.2 0.8 2.3 3.15 1.0 274.3 11.5 8.9 3.7
S31ID 3.03 0.1 270.8 11.2 0.9 2.1 3.16 1.0 275.3 11.5 9.0 3.5
S32ID 3.03 0.1 270.0 11.2 1.2 2.2 3.16 1.0 274.4 11.5 9.0 3.6
S33ID 3.02 0.1 268.9 11.2 7.7 2.4 3.15 1.3 273.4 11.5 11.7 3.7
S34ID 3.01 0.1 267.7 11.3 6.1 1.9 3.14 1.1 272.1 11.5 10.8 3.4
S35ID 2.99 0.1 266.5 11.2 2.1 2.5 3.12 1.1 271.0 11.5 9.2 3.8


Table 2: Source Point Data Generated Thu Apr 25 16:08:54 CDT 2013 for I=51.78 mA
Name betax alphax etax etaxp betay alphay etay etayp
  m   m   m   m  
S1ID 19.1 -0.012 0.170 -0.000 2.9 -0.006 0.001 0.002
S2ID 19.2 0.013 0.170 -0.000 2.9 0.004 -0.001 -0.003
S3ID 19.5 0.009 0.170 0.000 2.9 0.012 -0.001 0.002
S4ID 19.5 0.002 0.169 0.000 3.0 0.014 0.001 -0.002
S5ID 19.3 -0.008 0.166 0.000 3.0 0.024 0.002 0.002
S6ID 19.3 -0.016 0.164 0.000 3.1 0.034 0.002 -0.002
S7ID 19.0 -0.006 0.163 0.000 3.1 0.037 -0.003 0.002
S8ID 19.0 0.024 0.162 -0.000 3.1 0.037 0.002 -0.002
S9ID 19.7 0.016 0.161 -0.000 3.1 0.027 0.003 0.002
S10ID 19.8 -0.011 0.164 -0.000 3.1 0.006 0.004 -0.002
S11ID 19.5 -0.025 0.166 -0.000 3.1 0.004 0.000 0.002
S12ID 18.9 -0.006 0.166 -0.000 3.1 0.002 0.002 -0.002
S13ID 19.0 0.001 0.167 -0.000 3.2 -0.013 -0.002 0.002
S14ID 19.2 0.025 0.168 0.000 3.2 -0.017 0.003 -0.002
S15ID 19.7 -0.000 0.167 0.000 3.1 -0.022 -0.004 0.002
S16ID 19.5 -0.002 0.167 0.000 3.1 -0.027 0.001 -0.002
S17ID 19.1 -0.021 0.166 -0.000 3.1 -0.033 0.004 0.002
S18ID 19.1 0.017 0.164 -0.000 3.1 -0.030 -0.003 -0.002
S19ID 19.3 0.010 0.164 0.000 3.1 -0.035 0.004 0.002
S20ID 19.5 0.016 0.165 0.000 3.1 -0.032 0.002 -0.002
S21ID 19.5 -0.008 0.165 -0.000 3.0 -0.027 0.001 0.002
S22ID 19.2 -0.019 0.166 -0.000 3.0 -0.022 0.000 -0.002
S23ID 18.8 0.003 0.167 -0.000 3.0 -0.017 0.003 0.002
S24ID 19.2 0.024 0.167 0.000 3.0 -0.011 0.004 -0.002
S25ID 19.4 0.009 0.165 0.000 3.0 -0.019 0.000 0.002
S26ID 19.5 -0.008 0.163 0.000 3.0 0.016 -0.001 -0.002
S27ID 19.2 -0.021 0.164 0.000 3.0 0.057 0.002 0.002
S28ID 19.1 -0.012 0.166 -0.000 3.1 0.061 0.001 -0.002
S29ID 19.2 -0.005 0.167 -0.000 3.1 0.028 0.000 0.002
S30ID 19.4 0.000 0.167 -0.000 3.1 0.027 -0.000 -0.002
S31ID 19.5 -0.012 0.168 -0.000 3.1 0.024 -0.000 0.002
S32ID 19.3 -0.008 0.168 0.000 3.1 0.019 0.001 -0.002
S33ID 19.3 -0.014 0.166 0.000 3.1 0.013 0.008 0.003
S34ID 19.3 -0.006 0.164 0.000 3.1 -0.003 -0.006 -0.002
S35ID 19.4 -0.005 0.161 0.000 3.1 0.015 0.002 0.003


Table 3: Source Point Data Generated Thu Apr 25 16:08:54 CDT 2013 for I=51.78 mA, along with nominal (0) values.
Name exEff CplngEff Sx Sxp Sy Syp exEff0 CplngEff0 Sx0 Sxp0 Sy0 Syp0
  nm % um urad um urad nm % um urad um urad
S1BM 3.10 0.1 82.8 52.8 17.8 0.6 3.23 1.0 84.1 53.8 30.9 1.3
S2BM 3.10 0.1 81.7 52.7 18.3 0.4 3.22 1.0 83.0 53.8 31.2 1.2
S3BM 3.10 0.1 81.3 53.1 19.7 0.5 3.23 1.0 82.6 54.2 32.0 1.2
S4BM 3.08 0.1 80.9 53.3 17.8 0.4 3.20 1.0 82.2 54.4 31.0 1.2
S5BM 3.07 0.1 81.7 53.6 17.1 0.5 3.20 1.0 83.0 54.6 30.5 1.3
S6BM 3.10 0.1 82.2 53.6 19.1 0.5 3.22 1.0 83.5 54.6 31.6 1.3
S7BM 3.10 0.1 82.2 53.4 19.0 0.3 3.23 1.0 83.5 54.5 31.6 1.2
S8BM 3.12 0.1 81.9 53.7 17.6 0.3 3.25 1.0 83.2 54.7 30.6 1.2
S9BM 3.14 0.1 82.0 54.3 17.1 0.6 3.27 1.0 83.3 55.3 30.1 1.3
S10BM 3.13 0.1 82.6 54.3 20.2 0.6 3.25 1.0 83.9 55.4 32.0 1.3
S11BM 3.10 0.0 83.0 53.7 14.3 0.6 3.23 0.9 84.3 54.8 28.4 1.3
S12BM 3.10 0.0 82.5 53.1 16.3 0.4 3.23 1.0 83.8 54.1 29.4 1.2
S13BM 3.11 0.1 82.1 53.0 17.9 0.3 3.24 1.0 83.4 54.1 30.4 1.2
S14BM 3.10 0.1 81.0 53.3 18.2 0.2 3.23 1.0 82.3 54.3 30.6 1.2
S15BM 3.10 0.1 81.7 53.9 18.3 0.2 3.23 1.0 83.0 54.9 30.7 1.2
S16BM 3.08 0.1 81.6 53.6 16.7 0.3 3.21 1.0 82.9 54.7 29.8 1.2
S17BM 3.09 0.1 82.9 53.2 15.3 0.8 3.22 1.0 84.2 54.3 29.0 1.4
S18BM 3.11 0.1 82.0 53.4 17.6 0.8 3.24 1.0 83.3 54.4 30.2 1.4
S19BM 3.13 0.1 82.2 53.5 15.3 1.1 3.26 1.1 83.5 54.5 29.0 1.6
S20BM 3.12 0.1 81.7 53.7 20.1 0.7 3.25 1.0 83.0 54.8 31.9 1.4
S21BM 3.11 0.1 82.5 53.8 19.1 0.6 3.24 1.0 83.8 54.8 31.3 1.3
S22BM 3.11 0.1 83.0 53.3 18.9 0.6 3.24 1.0 84.3 54.3 31.2 1.3
S23BM 3.11 0.0 82.3 52.8 13.4 0.7 3.23 1.0 83.6 53.8 28.3 1.4
S24BM 3.11 0.1 81.6 53.3 16.5 0.6 3.24 1.0 82.8 54.3 30.0 1.3
S25BM 3.11 0.1 81.9 53.7 16.7 0.5 3.23 1.0 83.2 54.7 30.0 1.3
S26BM 3.11 0.1 82.4 53.9 17.8 0.6 3.24 1.0 83.6 54.9 30.7 1.3
S27BM 3.11 0.1 82.6 53.6 16.5 0.9 3.24 1.0 83.9 54.6 30.2 1.4
S28BM 3.11 0.1 82.5 53.3 17.6 0.4 3.24 1.0 83.8 54.3 30.9 1.2
S29BM 3.11 0.1 82.7 53.3 17.9 0.6 3.24 1.0 84.0 54.3 30.8 1.3
S30BM 3.11 0.1 82.1 53.4 18.5 0.5 3.24 1.0 83.4 54.4 31.0 1.2
S31BM 3.10 0.1 82.2 53.4 17.3 0.6 3.23 1.0 83.5 54.5 30.2 1.3
S32BM 3.09 0.1 81.9 53.3 17.8 0.3 3.21 1.0 83.2 54.3 30.5 1.2
S33BM 3.09 0.1 81.9 53.3 15.4 1.1 3.21 1.1 83.3 54.4 29.1 1.6
S34BM 3.09 0.1 81.7 53.4 13.8 1.2 3.22 1.1 83.0 54.5 28.2 1.7
S35BM 3.19 0.1 96.6 58.4 19.2 0.9 3.32 1.0 98.0 59.3 31.3 1.4


Table 4: Source Point Data Generated Thu Apr 25 16:08:54 CDT 2013 for I=51.78 mA
Name betax alphax etax etaxp betay alphay etay etayp
  m   m   m   m  
S1BM 1.8 0.742 0.053 -0.026 25.1 0.529 -0.019 0.001
S2BM 1.7 0.718 0.052 -0.026 25.0 0.483 0.019 -0.000
S3BM 1.7 0.722 0.052 -0.026 25.0 0.516 -0.020 0.001
S4BM 1.7 0.734 0.051 -0.026 25.4 0.601 0.018 -0.000
S5BM 1.7 0.762 0.052 -0.027 25.1 0.572 -0.018 0.000
S6BM 1.7 0.747 0.053 -0.027 25.0 0.554 0.020 -0.001
S7BM 1.7 0.730 0.053 -0.028 25.1 0.557 -0.020 0.000
S8BM 1.7 0.721 0.053 -0.028 24.6 0.534 0.018 -0.000
S9BM 1.7 0.735 0.054 -0.028 24.1 0.501 -0.018 0.001
S10BM 1.7 0.765 0.054 -0.028 24.1 0.543 0.021 -0.001
S11BM 1.8 0.775 0.053 -0.027 23.6 0.488 -0.015 0.001
S12BM 1.7 0.740 0.053 -0.027 23.6 0.497 0.017 -0.000
S13BM 1.7 0.721 0.053 -0.027 23.6 0.536 -0.019 0.000
S14BM 1.7 0.719 0.052 -0.026 23.7 0.566 0.019 -0.000
S15BM 1.7 0.755 0.053 -0.027 23.7 0.552 -0.019 0.000
S16BM 1.7 0.755 0.052 -0.027 23.9 0.571 0.017 -0.000
S17BM 1.8 0.757 0.053 -0.027 23.9 0.545 -0.016 0.001
S18BM 1.7 0.723 0.053 -0.027 23.7 0.505 0.018 -0.001
S19BM 1.7 0.715 0.053 -0.027 24.0 0.552 -0.016 0.001
S20BM 1.7 0.726 0.053 -0.027 24.1 0.566 0.021 -0.001
S21BM 1.7 0.756 0.053 -0.027 24.2 0.549 -0.020 0.001
S22BM 1.8 0.749 0.053 -0.027 24.4 0.551 0.020 -0.001
S23BM 1.7 0.718 0.053 -0.027 24.4 0.565 -0.014 0.001
S24BM 1.7 0.716 0.053 -0.027 24.8 0.565 0.017 -0.001
S25BM 1.7 0.736 0.053 -0.027 24.5 0.510 -0.017 0.001
S26BM 1.7 0.745 0.053 -0.028 24.6 0.503 0.018 -0.001
S27BM 1.7 0.740 0.053 -0.028 25.1 0.510 -0.017 0.001
S28BM 1.7 0.736 0.053 -0.027 25.4 0.546 0.018 -0.000
S29BM 1.7 0.747 0.053 -0.027 24.7 0.538 -0.019 0.001
S30BM 1.7 0.733 0.053 -0.027 24.3 0.479 0.019 -0.000
S31BM 1.7 0.748 0.053 -0.027 24.1 0.483 -0.018 0.001
S32BM 1.7 0.747 0.052 -0.027 23.9 0.487 0.019 -0.000
S33BM 1.7 0.743 0.052 -0.027 23.9 0.476 -0.016 0.001
S34BM 1.7 0.728 0.052 -0.027 23.7 0.480 0.014 -0.001
S35BM 2.3 1.036 0.064 -0.037 24.1 0.483 -0.020 0.001





Operations Analysis - Louis Emery 2013-04-25