Table 1: Source Point Data Generated Tue Feb 14 13:03:03 CST 2012 for I=96.58 mA, along with nominal (0) values.
Name exEff CplngEff Sx Sxp Sy Syp exEff0 CplngEff0 Sx0 Sxp0 Sy0 Syp0
  nm % um urad um urad nm % um urad um urad
S1ID 3.13 1.2 275.0 11.4 10.4 3.7 3.16 0.9 275.9 11.5 8.8 3.2
S2ID 3.14 1.2 275.0 11.4 10.4 3.7 3.17 0.9 275.9 11.5 8.8 3.2
S3ID 3.14 1.3 275.2 11.4 10.9 3.7 3.17 0.9 276.1 11.5 9.3 3.2
S4ID 3.12 1.3 275.4 11.3 10.7 3.7 3.15 0.9 276.3 11.4 9.1 3.2
S5ID 3.10 1.3 274.3 11.3 10.3 3.8 3.13 0.9 275.2 11.4 8.6 3.3
S6ID 3.09 1.2 272.0 11.4 10.4 3.7 3.12 0.9 272.9 11.4 8.8 3.1
S7ID 3.09 1.5 270.3 11.4 11.9 4.0 3.11 1.1 271.2 11.5 10.6 3.5
S8ID 3.08 1.4 271.2 11.4 11.2 3.9 3.11 1.0 272.1 11.4 9.7 3.4
S9ID 3.09 1.3 272.3 11.4 10.3 3.9 3.12 0.9 273.2 11.4 8.6 3.4
S10ID 3.10 1.4 273.3 11.4 11.4 3.8 3.13 1.0 274.2 11.4 9.9 3.3
S11ID 3.13 1.2 274.4 11.4 10.2 3.7 3.15 0.9 275.3 11.5 8.6 3.1
S12ID 3.14 1.3 275.5 11.4 10.9 3.7 3.17 0.9 276.4 11.5 9.4 3.1
S13ID 3.13 1.2 275.8 11.3 10.4 3.7 3.15 0.9 276.7 11.4 8.8 3.2
S14ID 3.11 1.3 274.6 11.3 10.9 3.7 3.14 0.9 275.5 11.4 9.3 3.2
S15ID 3.09 1.3 272.7 11.3 10.3 3.9 3.12 0.9 273.6 11.4 8.7 3.4
S16ID 3.08 1.3 270.2 11.4 10.7 3.8 3.11 1.0 271.2 11.5 9.2 3.3
S17ID 3.08 1.4 269.5 11.4 11.0 3.8 3.11 1.0 270.4 11.5 9.5 3.3
S18ID 3.09 1.4 270.6 11.4 10.9 4.1 3.11 1.0 271.5 11.5 9.3 3.6
S19ID 3.09 1.2 273.6 11.3 10.4 3.7 3.12 0.9 274.6 11.4 8.8 3.2
S20ID 3.12 1.5 276.2 11.3 12.1 3.8 3.14 1.1 277.1 11.3 10.8 3.3
S21ID 3.14 1.3 276.5 11.4 10.7 3.8 3.17 1.0 277.4 11.4 9.2 3.3
S22ID 3.15 1.3 276.7 11.4 11.1 3.8 3.18 1.0 277.6 11.5 9.6 3.2
S23ID 3.14 1.2 275.7 11.4 10.6 3.6 3.17 0.9 276.6 11.5 9.0 3.0
S24ID 3.11 1.2 274.5 11.3 10.2 3.7 3.14 0.9 275.4 11.4 8.6 3.2
S25ID 3.10 1.2 272.2 11.4 10.2 3.7 3.12 0.9 273.1 11.4 8.5 3.2
S26ID 3.07 1.3 270.3 11.4 10.2 3.8 3.10 0.9 271.3 11.4 8.6 3.3
S27ID 3.07 1.2 269.3 11.4 10.3 3.7 3.10 0.9 270.2 11.5 8.7 3.1
S28ID 3.09 1.3 269.8 11.4 10.5 3.8 3.11 0.9 270.7 11.5 8.9 3.3
S29ID 3.10 1.3 273.1 11.4 11.0 3.8 3.13 1.0 274.0 11.4 9.5 3.3
S30ID 3.11 1.3 275.7 11.3 10.6 4.0 3.14 1.0 276.7 11.4 9.1 3.5
S31ID 3.13 1.5 275.7 11.4 11.3 4.4 3.16 1.2 276.6 11.4 9.9 4.0
S32ID 3.15 1.3 275.9 11.4 10.1 4.0 3.17 0.9 276.8 11.5 8.5 3.5
S33ID 3.13 1.4 275.2 11.4 10.7 4.2 3.16 1.1 276.1 11.4 9.2 3.8
S34ID 3.12 1.3 274.5 11.4 10.2 3.9 3.15 0.9 275.4 11.4 8.6 3.4
S35ID 3.09 1.4 272.3 11.4 10.9 3.9 3.12 1.0 273.2 11.4 9.4 3.4


Table 2: Source Point Data Generated Tue Feb 14 13:03:03 CST 2012 for I=96.58 mA
Name betax alphax etax etaxp betay alphay etay etayp
  m   m   m   m  
S1ID 19.3 -0.001 0.173 -0.000 2.9 -0.014 0.002 0.001
S2ID 19.1 0.006 0.174 0.000 2.9 -0.014 -0.002 -0.001
S3ID 19.2 0.013 0.174 0.000 2.9 -0.007 -0.004 0.001
S4ID 19.5 0.005 0.172 0.000 2.9 -0.001 0.003 -0.001
S5ID 19.5 -0.005 0.170 0.000 2.9 0.004 0.000 0.002
S6ID 19.4 -0.007 0.167 0.000 2.9 0.003 0.002 -0.001
S7ID 19.2 -0.002 0.166 0.000 2.9 0.000 -0.006 0.002
S8ID 19.4 0.008 0.166 -0.000 2.9 0.004 0.005 -0.002
S9ID 19.4 0.001 0.167 -0.000 2.9 0.004 -0.001 0.002
S10ID 19.4 -0.001 0.169 -0.000 2.9 0.004 0.005 -0.002
S11ID 19.3 -0.009 0.172 -0.000 2.9 0.002 -0.001 0.001
S12ID 19.2 0.000 0.175 -0.000 2.9 0.003 0.004 -0.001
S13ID 19.5 0.010 0.173 0.000 2.9 0.003 -0.002 0.001
S14ID 19.5 0.005 0.171 0.000 3.0 0.003 0.004 -0.001
S15ID 19.5 -0.006 0.168 0.000 3.0 0.003 0.001 0.002
S16ID 19.2 -0.007 0.165 0.000 3.0 0.000 -0.003 -0.002
S17ID 19.2 0.003 0.164 -0.000 3.0 -0.000 0.004 0.002
S18ID 19.2 0.018 0.166 -0.000 3.0 0.002 -0.004 -0.002
S19ID 19.6 0.009 0.168 -0.000 3.0 -0.003 0.002 0.001
S20ID 19.6 -0.003 0.172 -0.000 3.0 -0.009 0.007 -0.002
S21ID 19.3 -0.010 0.175 -0.000 2.9 -0.010 -0.003 0.002
S22ID 19.3 -0.010 0.176 0.000 2.9 -0.013 0.005 -0.001
S23ID 19.3 0.009 0.175 0.000 2.9 -0.013 0.003 0.001
S24ID 19.5 0.013 0.170 0.000 2.9 -0.020 0.001 -0.001
S25ID 19.4 0.000 0.168 0.001 2.9 -0.017 0.000 0.001
S26ID 19.4 -0.007 0.164 0.000 2.9 -0.017 0.000 -0.002
S27ID 19.2 -0.007 0.164 0.000 2.9 -0.014 0.001 0.001
S28ID 19.1 0.006 0.166 -0.000 2.9 -0.006 -0.002 -0.002
S29ID 19.4 0.005 0.169 -0.000 2.9 -0.007 0.004 0.002
S30ID 19.6 -0.005 0.172 -0.000 2.9 -0.001 -0.003 -0.002
S31ID 19.4 -0.003 0.174 -0.000 2.9 0.005 0.005 0.003
S32ID 19.2 0.005 0.175 0.000 2.9 0.008 0.001 -0.002
S33ID 19.3 0.003 0.173 0.000 2.8 0.009 0.004 0.002
S34ID 19.4 0.011 0.171 0.000 2.9 0.013 -0.002 -0.002
S35ID 19.4 0.005 0.168 0.000 2.8 0.010 0.004 0.002


Table 3: Source Point Data Generated Tue Feb 14 13:03:03 CST 2012 for I=96.58 mA, along with nominal (0) values.
Name exEff CplngEff Sx Sxp Sy Syp exEff0 CplngEff0 Sx0 Sxp0 Sy0 Syp0
  nm % um urad um urad nm % um urad um urad
S1BM 3.13 1.2 82.1 53.5 31.3 1.5 3.16 0.9 82.4 53.7 26.7 1.3
S2BM 3.11 1.2 81.3 53.2 31.3 1.5 3.14 0.9 81.5 53.4 26.7 1.3
S3BM 3.11 1.3 81.0 53.3 33.2 1.5 3.13 0.9 81.3 53.5 28.9 1.2
S4BM 3.11 1.3 81.0 53.6 32.8 1.4 3.14 0.9 81.3 53.9 28.4 1.2
S5BM 3.11 1.2 81.5 53.9 32.2 1.4 3.14 0.9 81.8 54.1 27.8 1.2
S6BM 3.13 1.3 82.2 54.0 32.5 1.5 3.15 0.9 82.5 54.2 28.1 1.3
S7BM 3.15 1.4 82.7 53.9 34.8 1.4 3.18 1.0 83.0 54.1 30.8 1.2
S8BM 3.17 1.4 82.7 54.1 33.6 1.4 3.20 1.0 82.9 54.3 29.3 1.2
S9BM 3.17 1.3 82.7 54.0 33.5 1.4 3.20 0.9 83.0 54.2 29.2 1.2
S10BM 3.16 1.3 82.9 53.9 34.3 1.4 3.18 1.0 83.2 54.1 30.1 1.2
S11BM 3.15 1.2 82.9 53.4 31.4 1.4 3.18 0.8 83.2 53.6 26.9 1.2
S12BM 3.13 1.2 82.2 53.1 32.1 1.4 3.16 0.9 82.4 53.3 27.6 1.1
S13BM 3.12 1.2 81.2 53.4 32.0 1.4 3.14 0.9 81.5 53.7 27.6 1.1
S14BM 3.11 1.2 81.0 53.7 31.5 1.4 3.14 0.9 81.2 53.9 27.0 1.2
S15BM 3.12 1.2 81.7 54.0 31.3 1.4 3.15 0.8 82.0 54.2 26.7 1.2
S16BM 3.14 1.2 82.7 54.0 31.3 1.5 3.17 0.9 82.9 54.2 26.7 1.2
S17BM 3.18 1.2 83.1 54.0 31.2 1.5 3.20 0.9 83.4 54.2 26.6 1.3
S18BM 3.19 1.2 82.8 53.9 31.7 1.5 3.22 0.9 83.1 54.1 27.3 1.3
S19BM 3.18 1.3 83.1 54.1 33.5 1.6 3.21 1.0 83.3 54.3 29.3 1.4
S20BM 3.16 1.4 82.8 53.7 35.5 1.4 3.19 1.0 83.1 54.0 31.6 1.2
S21BM 3.13 1.3 82.4 53.1 34.7 1.4 3.15 1.0 82.6 53.4 30.6 1.2
S22BM 3.11 1.3 82.0 52.9 33.2 1.4 3.14 1.0 82.3 53.1 29.0 1.1
S23BM 3.10 1.2 81.0 53.0 30.7 1.4 3.13 0.8 81.3 53.3 26.0 1.2
S24BM 3.11 1.2 80.5 53.8 32.0 1.4 3.14 0.9 80.8 54.0 27.5 1.2
S25BM 3.11 1.3 80.7 54.0 32.2 1.6 3.14 0.9 81.0 54.2 27.7 1.4
S26BM 3.13 1.2 82.0 54.4 32.8 1.5 3.15 0.9 82.2 54.6 28.4 1.3
S27BM 3.16 1.2 82.9 54.2 31.7 1.5 3.19 0.9 83.2 54.4 27.1 1.3
S28BM 3.18 1.2 83.1 53.8 31.8 1.4 3.21 0.8 83.3 54.1 27.2 1.2
S29BM 3.19 1.3 83.4 53.9 32.2 1.7 3.21 1.0 83.6 54.1 27.8 1.5
S30BM 3.17 1.3 82.9 53.8 32.2 1.6 3.19 0.9 83.2 54.0 27.8 1.4
S31BM 3.13 1.3 82.0 53.4 34.4 1.6 3.15 1.0 82.3 53.6 30.2 1.4
S32BM 3.11 1.4 81.7 53.1 34.2 1.7 3.14 1.1 82.0 53.4 30.0 1.5
S33BM 3.11 1.3 81.4 53.4 34.3 1.5 3.14 1.0 81.6 53.6 30.0 1.3
S34BM 3.11 1.4 81.0 53.6 33.1 1.6 3.14 1.0 81.3 53.8 28.7 1.5
S35BM 3.19 1.3 95.9 58.1 32.5 1.6 3.22 1.0 96.2 58.3 28.0 1.4


Table 4: Source Point Data Generated Tue Feb 14 13:03:03 CST 2012 for I=96.58 mA
Name betax alphax etax etaxp betay alphay etay etayp
  m   m   m   m  
S1BM 1.7 0.760 0.052 -0.025 25.3 0.621 -0.009 0.000
S2BM 1.7 0.741 0.050 -0.025 25.5 0.645 0.009 -0.001
S3BM 1.7 0.742 0.050 -0.025 25.5 0.629 -0.014 0.000
S4BM 1.7 0.749 0.050 -0.025 25.6 0.625 0.013 0.000
S5BM 1.7 0.763 0.051 -0.026 25.5 0.600 -0.012 0.000
S6BM 1.7 0.761 0.051 -0.027 25.4 0.587 0.013 -0.001
S7BM 1.7 0.746 0.052 -0.027 25.4 0.590 -0.018 -0.000
S8BM 1.7 0.739 0.053 -0.027 25.3 0.562 0.016 0.000
S9BM 1.7 0.745 0.053 -0.027 25.5 0.607 -0.015 0.000
S10BM 1.7 0.759 0.053 -0.026 25.4 0.572 0.017 -0.000
S11BM 1.7 0.755 0.053 -0.026 25.3 0.552 -0.010 0.000
S12BM 1.7 0.744 0.052 -0.025 25.2 0.553 0.012 -0.000
S13BM 1.7 0.739 0.051 -0.025 25.1 0.549 -0.012 0.000
S14BM 1.7 0.740 0.050 -0.026 25.5 0.612 0.010 -0.000
S15BM 1.7 0.758 0.051 -0.027 25.4 0.588 -0.009 0.000
S16BM 1.7 0.755 0.052 -0.027 25.2 0.572 0.009 -0.000
S17BM 1.7 0.736 0.053 -0.027 25.1 0.552 -0.009 0.001
S18BM 1.7 0.724 0.053 -0.027 25.2 0.569 0.011 -0.001
S19BM 1.7 0.748 0.054 -0.026 25.0 0.546 -0.016 0.001
S20BM 1.7 0.755 0.053 -0.026 25.1 0.579 0.020 -0.000
S21BM 1.7 0.756 0.052 -0.025 25.1 0.570 -0.018 0.000
S22BM 1.7 0.748 0.051 -0.025 25.1 0.550 0.015 -0.000
S23BM 1.7 0.731 0.050 -0.025 25.1 0.565 -0.007 0.000
S24BM 1.7 0.734 0.050 -0.026 25.3 0.601 0.011 -0.000
S25BM 1.7 0.745 0.050 -0.026 25.7 0.673 -0.011 0.001
S26BM 1.7 0.764 0.051 -0.027 25.5 0.623 0.013 -0.000
S27BM 1.7 0.750 0.053 -0.027 25.5 0.630 -0.010 0.001
S28BM 1.7 0.732 0.053 -0.027 25.7 0.637 0.010 -0.000
S29BM 1.7 0.747 0.054 -0.026 25.5 0.592 -0.012 0.001
S30BM 1.7 0.759 0.053 -0.026 25.6 0.580 0.012 -0.001
S31BM 1.7 0.754 0.051 -0.025 25.9 0.596 -0.017 0.001
S32BM 1.7 0.749 0.051 -0.025 25.8 0.584 0.017 -0.001
S33BM 1.7 0.746 0.050 -0.025 25.8 0.569 -0.017 0.001
S34BM 1.7 0.740 0.050 -0.026 25.8 0.566 0.014 -0.001
S35BM 2.3 1.052 0.061 -0.035 26.0 0.562 -0.012 0.001



Operations Analysis - Louis Emery 2012-02-14